Drilling high aspect ratio holes by femtosecond laser filament with aberrations

doi:10.1007/s12200-021-1214-4

Front. Optoelectron.

2021, Vol. 14

Issue (4) : 522-528 https://doi.org/10.1007/s12200-021-1214-4

RESEARCH ARTICLE

Drilling high aspect ratio holes by femtosecond laser filament with aberrations

Manshi WANG, Zhiqiang YU, Nan ZHANG(

), Weiwei LIU

Institute of Modern Optics, Nankai University, Tianjin Key Laboratory of Micro-scale Optical Information Science and Technology, Tianjin 300350, China

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Abstract

A near-infrared femtosecond laser is focused by a 100 mm-focal-length plano-convex lens to form a laser filament, which is employed to drill holes on copper targets. By shifting or rotating the focusing lens, additional aberration is imposed on the focused laser beam, and significant influence is produced on the aspect ratio and cross-sectional shape of the micro-holes. Experimental results show that when proper aberration is introduced, the copper plate with a thickness of 3 mm can be drilled through with an aspect ratio of 30, while no through-holes can be drilled on 3-mm-thickness copper plates by femtosecond laser with minimized aberration. In addition, when femtosecond laser filament with large astigmatism is used, micro-holes that had a length to width ratio up to 3.3 on the cross-section are obtained. Therefore, the method proposed here can be used to fabricate long oval holes with high aspect ratios.

Keywords femtosecond laser aberration drilling high aspect ratio

Corresponding Author(s): Nan ZHANG

Just Accepted Date: 13 May 2021 Online First Date: 13 July 2021 Issue Date: 06 December 2021

Cite this article:

Manshi WANG,Zhiqiang YU,Nan ZHANG, et al. Drilling high aspect ratio holes by femtosecond laser filament with aberrations[J]. Front. Optoelectron., 2021, 14(4): 522-528.

URL:

https://academic.hep.com.cn/foe/EN/10.1007/s12200-021-1214-4
https://academic.hep.com.cn/foe/EN/Y2021/V14/I4/522

Fig.1 Top view of experimental setup for femtosecond laser drilling copper plates

Fig.2 (a) Optical microscopic images of the drilled top surface of copper plates. Dependences of the top surface hole diameters D_x (b), D_y (c), and hole symmetry (d) on the target defocusing amount. The copper plate has a thickness of 0.5 mm

Fig.3 Dependences of top surface D_x (a), D_y (b), and symmetry (c) on the lens offset and target defocusing amount. (d) Optical microscopic images of holes on the top surface. The copper plate has a thickness of 0.5 mm. These through-holes are drilled by femtosecond laser with an average power of 0.5 W

Fig.4 Characteristics of through holes drilled by femtosecond laser filament with lens shifting. Aspect ratio (a) and taper (b) of holes in 0.5 mm-thickness copper plates are presented. The lens shifting amount ranges from 0 to 5 mm. The average laser power is 0.5 W

Fig.5 Dependences of the top-surface hole diameters D_x (a), D_y (b), and symmetry (c) on the lens rotation angle and target defocusing amount. (d) Optical microscopic images of holes on the top target surface. The copper plate has a thickness of 0.5 mm. These through-holes are drilled by femtosecond laser with an average power of 0.5 W

Fig.6 Characteristics of through holes drilled by femtosecond laser filament with lens rotation. Aspect ratio (a) and taper (b) of holes in 0.5 mm-thickness copper plate are presented. The lens rotation angle ranges from 0° to 8°. The average laser power is 0.5 W

Fig.7 Hole tapers for the X direction (a) and Y direction (b) on the 0.5-mm-thickness copper plate. The lens rotation angle ranges from 0° to 8°. The average laser power is 0.5 W

	aspect ratio	taper	symmetry	drilling result
offset= 0, $φ$ = 0°			1.0	blind holes*
offset= 4 mm, $φ$ = 0°	25.2	0.4°	1.0	through holes
offset= 0, $φ$ = 5°	34.1	0.2°	0.7	through holes

Tab.1 Characteristics of holes on 3 mm copper plate at DA= 1.5 mm

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