Piezoresistive pressure sensor with high sensitivity for medical application using peninsula-island structure

doi:10.1007/s11465-017-0447-9

Front. Mech. Eng.

2017, Vol. 12

Issue (4) : 546-553 https://doi.org/10.1007/s11465-017-0447-9

RESEARCH ARTICLE

Piezoresistive pressure sensor with high sensitivity for medical application using peninsula-island structure

Tingzhong XU^1,², Hongyan WANG³(

), Yong XIA¹, Zhiming ZHAO¹, Mimi HUANG¹, Jiuhong WANG¹, Libo ZHAO¹, Yulong ZHAO¹, Zhuangde JIANG¹

¹. State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Collaborative Innovation Center of Suzhou Nano Science and Technology, School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an 710049, China
². School of Mechanical and Manufacturing Engineering, University of New South Wales, Sydney, NSW 2052, Australia
³. Shaanxi Institute of Metrology Science, Xi’an 710065, China

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Abstract

A novel micro-electromechanical systems piezoresistive pressure sensor with a diagonally positioned peninsula-island structure has high sensitivity for ultra-low-pressure measurement. The pressure sensor was designed with a working range of 0–500 Pa and had a high sensitivity of 0.06 mV·V⁻¹·Pa⁻¹. The trade-off between high sensitivity and linearity was alleviated. Moreover, the influence of the installation angle on the sensing chip output was analyzed, and an application experiment of the sensor was conducted using the built pipettor test platform. Findings indicated that the proposed pressure sensor had sufficient resolution ability and accuracy to detect the pressure variation in the pipettor chamber. Therefore, the proposed pressure sensor has strong potential for medical equipment application.

Keywords MEMS low pressure sensor peninsula-island ultra-high sensitivity medical application

Corresponding Author(s): Hongyan WANG

Just Accepted Date: 07 June 2017 Online First Date: 25 July 2017 Issue Date: 31 October 2017

Cite this article:

Tingzhong XU,Hongyan WANG,Yong XIA, et al. Piezoresistive pressure sensor with high sensitivity for medical application using peninsula-island structure[J]. Front. Mech. Eng., 2017, 12(4): 546-553.

URL:

https://academic.hep.com.cn/fme/EN/10.1007/s11465-017-0447-9
https://academic.hep.com.cn/fme/EN/Y2017/V12/I4/546

Fig.1 Schematics of the proposed structure. (a) Schematic of the sensor chip cavity; (b) mask of the sensor chip

Fig.2 Optimization process of the diagonally positioned peninsula-island structure. (a) Peninsula length optimization; (b) island length optimization

Fig.3 Piezoresistors captured by CLE. (a) Pattern I for piezoresistor; (b) Pattern II for piezoresistor

Fig.4 Peninsula-island structure captured by CLE

Fig.5 Sensor chip observed by CLE

Fig.6 Experiment setup of the sensor chip. (a) Package structure of the sensor chip; (b) block diagram of the experimental system

Tab.1 Calibration data for the developed pressure sensor

Fig.7 Output voltage versus applied pressure ranging from 0 to 500 Pa

Tab.2 Performance of the developed pressure sensor

Fig.8 Experimental setup for the cross sensitivity evaluation of the developed sensing chip. (a) Detailed installation dependencies between the sensing chip and the rotation part of the platform; (b) whole experimental setup

Fig.9 Output voltage versus installation angle of the sensing chip from –180° to 180°

Fig.10 Comparison between the working mechanism of the pipettor with and without a pressure detection module

Fig.11 Pipettor testing system. (a) Experimental set; (b) block diagram of the experiment

Fig.12 Inner chamber pressure detection during the evaporation process of anhydrous ethanol

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