Recent advances in micro- and nano-machining technologies

doi:10.1007/s11465-017-0410-9

Front. Mech. Eng.

2017, Vol. 12

Issue (1) : 18-32 https://doi.org/10.1007/s11465-017-0410-9

REVIEW ARTICLE

Recent advances in micro- and nano-machining technologies

Shang GAO^1,², Han HUANG¹(

)

¹. School of Mechanical and Mining Engineering, The University of Queensland, QLD 4072, Australia
². Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian 116024, China

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Abstract

Device miniaturization is an emerging advanced technology in the 21st century. The miniaturization of devices in different fields requires production of micro- and nano-scale components. The features of these components range from the sub-micron to a few hundred microns with high tolerance to many engineering materials. These fields mainly include optics, electronics, medicine, bio-technology, communications, and avionics. This paper reviewed the recent advances in micro- and nano-machining technologies, including micro-cutting, micro-electrical-discharge machining, laser micro-machining, and focused ion beam machining. The four machining technologies were also compared in terms of machining efficiency, workpiece materials being machined, minimum feature size, maximum aspect ratio, and surface finish.

Keywords micro machining cutting electro discharge machining (EDM) laser machining focused ion beam (FIB)

Corresponding Author(s): Han HUANG

Just Accepted Date: 16 November 2016 Online First Date: 23 December 2016 Issue Date: 21 March 2017

Cite this article:

Shang GAO,Han HUANG. Recent advances in micro- and nano-machining technologies[J]. Front. Mech. Eng., 2017, 12(1): 18-32.

URL:

https://academic.hep.com.cn/fme/EN/10.1007/s11465-017-0410-9
https://academic.hep.com.cn/fme/EN/Y2017/V12/I1/18

Tab.1 Machining capabilities of typical micro cutting processes

Fig.1 Schematic of chip formation in (a) macro-cutting and (b) micro-cutting [25]

Fig.2 Micro-cutting tools of 25 mm in diameter made by FIB micro-milling having (a) 2, (b) 4 and (c) 5 cutting edges [50]

Fig.3 (a) A micro-cutting tool of 3 mm in diameter made by EDM and the fabricated (b) micro-hole and (c) micro-slot [51]

Fig.4 (a) A sharp-edge microstructure array, (b) a high aspect ratio pillared microstructure array and (c) a micro-compressor machined by the micro-EDM [9,13,54]

Fig.5 Process strategy for wear compensation in micro-EDM milling [53]

Fig.6 Schematic of a WEDG system [65]

Fig.7 WEDG principle implemented into micro-wire EDM [69]

Fig.8 Micro electrode machined by micro-wire EDM [13]

Fig.9 (a) Micro-through-hole arrays, (b) honeycomb micro-structures, (c) a micro-spinneret, and (d) cone-like-protrusions fabricated by the laser micro-machining [72]

Fig.10 Schematic of (a) percussion laser micro-drilling and (b) laser micro-drilling [74]

Fig.11 Micro-holes machined by (a) percussion laser micro-drilling and (b) trepan laser micro-drilling

Fig.12 (a) A TEM specimen, (b) Mo-alloy micro-pillars and (c) a monocrystal diamond micro-tool fabricated by FIB micro-milling [88,92,93]

Fig.13 (a) Spherical and (b) hemi-spherical micro-cutting tools fabricated by the FIB micro-milling [94]

Fig.14 Nanoscale Si island arrays with hexagonal symmetry fabricated by the FIB micro-milling [98]

Fig.15 A typical micrometer-sized cantilever machined by FIB micro-milling: (a) 0° tilt/top view, (b) and (c) 40° tilt, (d) 90° tilt/side view [100]

Tab.2 Machining capabilities of micro- and nano-machining technologies

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