Designs and experiments on infrared two-dimensional silicon photonic crystal slab devices

doi:10.1007/s12200-012-0192-y

Front Optoelec

2012, Vol. 5

Issue (1) : 21-40 https://doi.org/10.1007/s12200-012-0192-y

REVIEW ARTICLE

Designs and experiments on infrared two-dimensional silicon photonic crystal slab devices

Lin GAN, Zhiyuan LI(

)

Laboratory of Optical Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China

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Abstract

Photonic crystal (PhC) has offered a powerful means to mold the flow of light and manipulate light-matter interaction at subwavelength scale. Silicon has a large refraction index and low loss in infrared wavelengths, which makes it an important optical material. And silicon has been widely used for integrated photonics applications. In this paper, we have reviewed some recent theoretical and experimental works in our group on infrared two-dimensional (2D) air-bridged silicon PhC slab devices that are based on both band gap and band structure engineering. We have designed, fabricated, and characterized a series of PhC waveguides with novel geometries, PhC high-quality (high-Q) cavity, and channel drop filters utilizing resonant coupling between waveguide and cavity. These devices are aimed to construct a more flexible network of transport channel for infrared light at micrometer/nanometer scale. We have also explored the remarkable dispersion properties of PhCs by engineering the band structures to achieve negative refraction, self-collimation, superprism, and other anomalous dispersion behaviors of infrared light beam. Furthermore, we have designed and fabricated a PhC structure with negative refraction effect and used scanning near-field optical microscopy to observe the negative refraction beam. Finally, we have designed and realized a PhC structure that exhibits a self-collimation effect in a wide angle range and with a large bandwidth. Our works presented in this review show that PhCs have a strong power of controlling propagation of light at micrometer/nanometer scale and possess a great potential of applications in integrated photonic circuits.

Keywords photonic crystal (PhC) waveguide high-quality (high-Q) cavity channel-drop filter negative refraction

Corresponding Author(s): LI Zhiyuan,Email:lizy@aphy.iphy.ac.cn

Issue Date: 05 March 2012

Cite this article:

Lin GAN,Zhiyuan LI. Designs and experiments on infrared two-dimensional silicon photonic crystal slab devices[J]. Front Optoelec, 2012, 5(1): 21-40.

URL:

https://academic.hep.com.cn/foe/EN/10.1007/s12200-012-0192-y
https://academic.hep.com.cn/foe/EN/Y2012/V5/I1/21

Fig.1 (a) Schematic view of 2D air-bridged PhC structures with input silicon waveguide. Whole structures are fabricated in SOI wafer. Air-bridged structures are formed by HF wet etching; (b) and (c) are top-view SEM and optical microscopy image of practical PhC sample used in experiment. Long adiabatically tapering ridge waveguide connected with PhC structure can be clearly visualized

Fig.2 (a) Schematic view and (b) experimental setup for optical characterization of infrared 2D silicon PhC slab structures; (c) typical optical microscopy picture recorded by CCD camera for PhC sample as displayed in Fig. 1(b)

Fig.3 (a) Photonic band structures for air holes triangular lattice PhC slab; (b) band diagrams for PhC W1 waveguide. The upper and lower bands correspond to even-symmetric and odd-symmetric guided mode, respectively

Fig.4 (a) Schematic of Γ-Μ waveguide constructed in a triangular-lattice PhC slab. The width of the waveguide , as well as the radius of air holes in the first and second row and , are the three crucial parameters to optimize the width of the transmission windows; (b) and (c) are SEM pictures of original and optimized Γ-Μ waveguides

Fig.5 Calculated modal dispersion relation of (a) original Γ-M waveguide and (b) optimized Γ-M waveguide. The band width of the waveguide modes (within the dashed boxes) is 22 nm in the original waveguide, which has parameters: lattice constant = 430 nm, hole radius , and waveguide width . After optimization by the following parameters as = 430 nm, = 50 nm, = 170 nm, and = 0.65, the waveguide band width is significantly broadened to 74 nm; (c) and (d) are the corresponding measured transmission spectra of the original and optimized waveguides

Fig.6 (a) Schematic geometry of 90° waveguide bends in a triangular lattice PhC slab with optimized Γ-M waveguide; (b) SEM picture of practical sample of 90° waveguide bends with optimized bend corner geometry

Fig.7 Simulation model (a) and calculated optical field distributions at (b) 1550 nm; (c) 1560 nm; (d) 1571 nm; (e) 1590 nm and (f) 1610 nm

Fig.8 (a) SEM topographic image, and near-field optical intensity distributions at (b) 1550 nm; (c) 1560 nm; (d) 1571 nm; (e) 1590?nm and (f) 1610 nm. White dotted lines in each optical picture denote the interface between W1 PhC waveguide and PCCCW. All pictures were obtained for the same scanning area of 12 μm × 15 μm

Fig.9 Schematics of (a) original PhC L3 nanocavity and (b) optimized nanocavity; (c) and (d) show radiation spectra of original PhC L3 nanocavity and optimized nanocavity, respectively

Fig.10 (a) SEM pictures of one of the fabricated samples, including the L3 nanocavtiy with displaced air holes; (b) radiation spectra calculated by FDTD method; (c) and (d) show transmission spectra of one of the fabricated samples. The maximum value of up to 71000 is obtained

Fig.11 (a) SEM image of three-port filter; (b) and (c) measured transmission spectra at ports 1 and 2, respectively

Fig.12 (a) Schematic view of one-channel PhC filter, major channel lies in the direction, and the cavity and output side channel are parallel to Γ-K direction of triangular lattice; (b) enlarged view of the filter around the cavity. Air holes have a general elliptical shape with one of its axes oriented counterclockwise by an angle with respect to axis. The two axes are of size and , respectively

Fig.13 (a) SEM image of four-channel filter; (b) simulation results of transmission spectra for four-channel filter; (c) experiment results of transmission spectra for the same filter

Tab.1 Structural parameters in four-channel filter

Fig.14 (a) SEM image of fabricated four-channel filter. Four cavities are located on two sides of input waveguide; (b) experimental transmission spectra of the four channel filter in linear scale. Inset: illustrates two groups of end points (air-hole centers) of cavity marked with “a, b” and “c, d.” Black arrows: moving direction of these air holes; (c) infrared CCD camera imaging of output signal observed in experiment for one channel of the sample. Bright spot appears at the end of the output channel when the input wavelength coincides with the resonant wavelength and disappears when it is at off-resonance

Tab.2 Structural parameters in the four channel Γ-M and Γ-M waveguides filter

Fig.15 (a) (Color online) Photonic band structures of TE-like bands for air-holes square-lattice PhC slab; (b) EFS contours of TE-like first band for the same PhC show that self-collimation can occur in the direction around the Γ-Μ direction; (c) EFS contours of the TE-like second band show that negative refraction can occur in the direction around the Γ-Μ direction

Fig.16 (a) SEM picture of PhC structure and an input waveguide. The width of waveguide is 2 μm; (b) light intensity distribution of TE-like modes for PhC with deliberately designed tapered air-holes interface; (c) directly observed pattern of radiated light of from the top using an objective lens; (d) SNOM picture of the negative refraction of the same wavelength. In each picture, the boundary of the PhC structure is superimposed as solid lines

Fig.17 (a) Schematic of PhC structure formed by square lattice of elliptical holes; (b) band diagram of the fourth, fifth and sixth TE bands; (c) EFS contours of the fifth TE band

Fig.18 Electric field intensity distribution with 0°, 20° and 60° incident angles at the minimum normalized frequency 0.36 (a) and the maximum 0.46 (b). A FDTD method is used in the simulations

Fig.19 Left panels: SEM pictures of designed PhC structures with 0° (a); 20° (b) and 60° (c) incident waveguide. Middle and right panels: Ray trace of light beam observed using IR camera and a high numerical aperture (NA = 0.50) objective. The patterns of the minimum and maximum wavelengths are shown for each incident angle

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